Focused Ion Beam Induced X-Ray Analysis

Focused ion beam preparation of samples for X-ray nanotomography.

The preparation of hard material samples with the necessary size and shape is critical to successful material analysis. X-ray nanotomography requires that samples are sufficiently thin for X-rays to pass through the sample during rotation for tomography. One method for producing samples that fit the criteria for X-ray nanotomography is focused ion beam/scanning electron microscopy (FIB/SEM) whi...

Monolithic focused reference beam X-ray holography

Fourier transform holography is a highly efficient and robust imaging method, suitable for single-shot imaging at coherent X-ray sources. In its common implementation, the image contrast is limited by the reference signal generated by a small pinhole aperture. Increased pinhole diameters improve the signal, whereas the resolution is diminished. Here we report a new concept to decouple the spati...

Focused Ion Beam Lithography

X-ray photoelectron spectroscopy analysis of ion-beam-induced oxidation of GaAs and AIGaAs

(Received 12 December 1991; accepted 6 April 1992) The oxidation of GaAs and AlGaAs targets subjected to ot bombardment has been analyzed, using in situ x-ray photoelectron spectroscopy, as a function of time until steady state is reached. The oxides formed by the ot bombardment have been characterized in terms of composition and binding energy. A strong energy and angular dependence for the ox...

X-ray luminescence computed tomography using a focused x-ray beam.

Due to the low x-ray photon utilization efficiency and low measurement sensitivity of the electron multiplying charge coupled device camera setup, the collimator-based narrow beam x-ray luminescence computed tomography (XLCT) usually requires a long measurement time. We, for the first time, report a focused x-ray beam-based XLCT imaging system with measurements by a single optical fiber bundle ...